High Vacuum Packaging of MEMS Devices Webinar

03-04 - 2026-03-04MS-Teams (online)

Date

04.03.2025 - 03:00-04:00 p.m.
Webinar in English
Participation free of charge

Speaker: Dr. Veit Große

Topics

Requirements of Modern High-Precision MEMS Sensors
High-Vacuum Sealing: Fundamentals & Technical Challenges
Getter Materials: Properties & Selection Criteria
Vacuum Encapsulation in the SRO-GETTER Process

Important note: If you are unable to attend in person, transfer to another participant is of course possible.

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High Vacuum Packaging of MEMS Devices Webinar

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