SRO-GETTER Kurtz Ersa Semicon

The SRO-GETTER is designed to seal packages with lids, which incorporate getter material to maintain a high vacuum over the lifetime of MEMS devices like microbolometers and gyroscopes. It can be used for R&D and in production lines. The device features top and bottom IR heating with two independently monitored and controlled heating zones. It can heat uniformly up to 450 °C. Package and lid are thermally isolated during the getter activation to keep the temperature sensitive device below 100 °C. The tooling is designed specifically to accommodate the customer package and allows optimal process control and precise package-to-lid alignment. A mass spectrometer can be added as an option to the system for residual gas analysis (RGA) during the sealing process.