SRO-GETTER Kurtz Ersa Semicon
High vacuum packaging with thermal getter activation
The SRO-GETTER is designed to seal packages with lids, which incorporate getter material to maintain a high vacuum over the lifetime of MEMS devices like microbolometers and gyroscopes. It can be used for R&D and in production lines. The device features top and bottom IR heating with two independently monitored and controlled heating zones. It can heat uniformly up to 450 °C. Package and lid are thermally isolated during the getter activation to keep the temperature sensitive device below 100 °C. The tooling is designed specifically to accommodate the customer package and allows optimal process control and precise package-to-lid alignment. A mass spectrometer can be added as an option to the system for residual gas analysis (RGA) during the sealing process.
Technical HighlightsSRO-GETTER
- High vacuum capability
- Independent temperature control of lid and package
- Process temperature up to 450 °C
- Package and lid separated during high vacuum getter activation
- Multiple TC monitoring
Common ApplicationsSRO-GETTER
- Package sealing with high vacuum encapsulation
- Thermal getter activation
- Microbolometers
- IR detectors
- Gyroscopes
- Sensors
Backend Semiconductor Production SRO-GETTERSemicon
SRO-GETTERSemicon
Technical data
Dimensions:
1,250 x 1,760 x 1,100 mm
Weight:
240 kg
Maximum product height:
1,028 mm +/- 20 mm adjustable
Heated area:
310 x 239 mm
Heating method:
2 arrangements, each with 12 IR emitters in 3 zones
Process temperature:
450 °C
Vacuum level:
10-6 mbar
Options
- Mass spectrometer, RGA
- External cooler
